General
Substrate
sizes:
Up to 550mm x 670mm standard
(Other sizes
available as custom configurations)
Thicknesses:
1.1mm, 0.7mm, 0.55mm standard
(Thin film
substrate chucks also available)
Process
Coating
width:
545mm head standard
(Other widths
available as custom configurations)
Standard coating thickness:
0.100 - 30 microns (typical after soft
bake)
(Other thicknesses can be achieved, depending on process
fluid)
Coat uniformity
within substrate:
Baseline --
+/- 5%
Target --
< +/- 3%
(Uniformity of less than
+/- 3% is achieved for most process fluids)